Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2019
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Application #:
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15638463
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Filing Dt:
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06/30/2017
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Publication #:
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Pub Dt:
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01/03/2019
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Inventors:
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Yu-Chen WEI, Chun-Jui CHU, Chun-Chieh CHAN, Jen-Chieh LAI, Shih-Ho LIN
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Title:
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POST-CMP CLEANING APPARATUS AND METHOD WITH BRUSH SELF-CLEANING FUNCTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| MCCLURE, QUALEY & RODACK, LLP |
| 3100 INTERSTATE NORTH CIRCLE |
| SUITE 150 |
| ATLANTA, GA 30339 |
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