Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/11/2023
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Application #:
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16114629
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Filing Dt:
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08/28/2018
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Publication #:
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Pub Dt:
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03/07/2019
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Inventors:
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Ioana Sorina Barbu, Murat Bozkurt, Maurits Van Der Schaar, Alberto Da Costa Assafrao
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Title:
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METHODS AND APPARATUS FOR MONITORING A MANUFACTURING PROCESS, INSPECTION APPARATUS, LITHOGRAPHIC SYSTEM, DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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PO BOX 324 |
VELDHOVEN, NETHERLANDS NL-5500 AH |
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PILLSBURY WINTHROP SHAW PITTMAN, LLP |
PO BOX 10500 |
MCLEAN, VA 22102 |
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