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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/27/2019
Application #:
16198297
Filing Dt:
11/21/2018
Publication #:
Pub Dt:
03/28/2019
Inventors:
Kartik Ramaswamy, Steven Lane, Lawrence Wong, Yang Yang, Richard Fovell
Title:
Method of Real Time In-Situ Chamber Condition Monitoring Using Sensors and Rf Communication
Assignment: 1
Reel/Frame:
047858/0777Recorded: 12/27/2018Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/19/2014
Exec Dt:
08/20/2014
Exec Dt:
08/20/2014
Exec Dt:
08/20/2014
Exec Dt:
08/20/2014
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
DAVID J. GOREN
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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