Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/05/2021
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Application #:
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16143694
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Filing Dt:
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09/27/2018
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Publication #:
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Pub Dt:
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04/04/2019
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Inventors:
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Hiroaki Inadomi, Tooru Nakamura, Kouji Kimoto, Yoshihisa Aoyama
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Title:
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SUBSTRATE PROCESSING APPARATUS HAVING PROCESSING BLOCK INCLUDING LIQUID PROCESSING UNIT, DRYING UNIT, AND SUPPLY UNIT ADJACENT TO THE TRANSPORT BLOCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-6325, JAPAN |
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| ABELMAN, FRAYNE & SCHWAB/LEE |
| 666 THIRD AVENUE |
| 10TH FLOOR |
| NEW YORK, NY 10017-4046 |
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