Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/14/2020
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Application #:
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16044765
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Filing Dt:
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07/25/2018
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Publication #:
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Pub Dt:
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05/16/2019
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Inventors:
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Chueh-Chi KUO, Tsung-Yen LEE, Chia-Hsin CHOU, Tzung-Chi FU, Li-Jui CHEN, Po-Chung CHENG et al
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Title:
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METHOD AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| MCCLURE, QUALEY & RODACK, LLP |
| 280 INTERSTATE NORTH CIRCLE SE |
| SUITE 550 |
| ATLANTA, GA 30339 |
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