Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/16/2021
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Application #:
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16404312
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Filing Dt:
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05/06/2019
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Publication #:
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Pub Dt:
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08/29/2019
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Inventors:
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Ekmini Anuja De Silva, Dario Goldfarb, Nelson Felix, Daniel Corliss, Rudy J. Wojtecki
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Title:
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PATTERNING MATERIAL FILM STACK WITH METAL-CONTAINING TOP COAT FOR ENHANCED SENSITIVITY IN EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| JOSEPH B. RYAN |
| 48 SOUTH SERVICE ROAD, SUITE 100 |
| RYAN, MASON & LEWIS, LLP |
| MELVILLE, NY 11747 |
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