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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/04/2021
Application #:
16294453
Filing Dt:
03/06/2019
Publication #:
Pub Dt:
09/26/2019
Inventors:
Beomjin YOO, Minhyoung KIM, Wonhyuk JANG, Hoseop CHOI, Jeongmin BANG, KyuHee HAN
Title:
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE USING THE APPARATUS
Assignment: 1
Reel/Frame:
048521/0857Recorded: 03/06/2019Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/12/2018
Exec Dt:
09/07/2018
Exec Dt:
12/20/2018
Exec Dt:
09/07/2018
Exec Dt:
09/07/2018
Exec Dt:
09/10/2018
Assignee:
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO
SUWON-SI, KOREA, REPUBLIC OF 16677
Correspondent:
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVENUE, N.W.
SUITE 800
WASHINGTON, DC 20037

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