Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/24/2020
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Application #:
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16380260
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Filing Dt:
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04/10/2019
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Publication #:
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Pub Dt:
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01/02/2020
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Inventors:
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Yusuke OSAWA, Syo FUKATA, Naoto UMEHARA, Sung Tae LEE
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Title:
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IN-SITU DEPOSITION AND ETCH PROCESS AND APPARATUS FOR PRECISION PATTERNING OF SEMICONDUCTOR DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5080 SPECTRUM DRIVE |
| SUITE 1050W |
| ADDISON, TEXAS 75001 |
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| THE MARBURY LAW GROUP, PLLC |
| 11800 SUNRISE VALLEY DRIVE |
| 15TH FLOOR |
| RESTON, VA 20191 |
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