Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/20/2021
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Application #:
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16557680
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Filing Dt:
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08/30/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Inventors:
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Dong Hyun KIM, Hyeon Woo PARK, Jang Woo CHO, Tae Ho KIM, Myung Ho LEE, Myung Geun SONG
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Title:
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SILICON NITRIDE LAYER ETCHING COMPOSITION AND ETCHING METHOD USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14, TAPSIL-RO 35BEON-GIL, GIHEUNG-GU |
| YONGIN-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 17084 |
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| KNOBBE, MARTENS, OLSON & BEAR LLP |
| 2040 MAIN ST., 14TH FL. |
| IRVINE, CA 92614 |
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