Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2022
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Application #:
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16547317
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Filing Dt:
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08/21/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Inventors:
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An-Ren ZI, Ching-Yu CHANG, Chin-Hsiang LIN
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Title:
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METHOD OF CLEANING EXTREME ULTRAVIOLET LITHOGRAPHY COLLECTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITOL STREET |
| WASHINGTON, DC 20001 |
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