Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15743614
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Filing Dt:
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01/10/2018
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Publication #:
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Pub Dt:
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03/12/2020
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Inventors:
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Stefan BANGERT, Andreas SAUER, Matthias HEYMANNS, Oliver HEIMEL, Sebastian Gunther ZANG
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Title:
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APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR TRANSPORTATION OF A SUBSTRATE CARRIER AND A MASK CARRIER IN A VACUUM CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SIEMENSSTRASSE 100 |
| ALZENAU, GERMANY 63755 |
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| PATTERSON + SHERIDAN LLP |
| 24 GREENWAY PLAZA |
| HOUSTON, TX 77046 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON + SHERIDAN LLP |
| 24 GREENWAY PLAZA |
| SUITE 1600 |
| HOUSTON, TX 77046 |
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