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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
11022898
Issue Dt:
06/01/2021
Application #:
16656942
Filing Dt:
10/18/2019
Publication #:
20200117102
Pub Dt:
04/16/2020
Inventors:
Yi-Lun LIU, Yuan-Yen LO, Ming-Jhih KUO
Title:
APPARATUS FOR EUV LITHOGRAPHY AND METHOD OF MEASURING FOCUS
Assignment: 1
Reel/Frame:
050758/0785Recorded: 10/18/2019Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
LIU, YI-LUN
Exec Dt:
06/05/2018
KUO, MING-JHIH
Exec Dt:
06/15/2018
LO, YUAN-YEN
Exec Dt:
06/05/2018
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300
Correspondent:
MCDERMOTT WILL & EMERY LLP
THE MCDERMOTT BUILDING
500 NORTH CAPITAL STREET, N.W.
WASHINGTON, DC 20001
Assignment: 2
Reel/Frame:
056106/0125Recorded: 04/30/2021Pages: 7
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE EXECUTION DATE OF SECOND INVENTOR PREVIOUSLY RECORDED ON REEL 050758 FRAME 0785. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
LIU, YI-LUN
Exec Dt:
06/05/2018
KUO, MING-JHIH
Exec Dt:
06/05/2018
LO, YUAN-YEN
Exec Dt:
06/05/2018
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300
Correspondent:
MCDERMOTT WILL & EMERY LLP
THE MCDERMOTT BUILDING
500 NORTH CAPITOL STREET, NW
WASHINGTON, DC 20001

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