Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16678667
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Filing Dt:
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11/08/2019
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Publication #:
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Pub Dt:
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05/14/2020
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Inventors:
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Brent D. Schwab, Christina A. Rathman, Steven L. Nelson
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Title:
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METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURES AFTER WET CHEMICAL PROCESSING
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Assignment:
1
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| 3455 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
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