Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16672237
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Filing Dt:
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11/01/2019
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Publication #:
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Pub Dt:
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05/21/2020
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Inventors:
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Dilyana S. Mihalova, Svetlen H. Tonchev, Jason E. Rama
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Title:
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METHOD AND APPARATUS FOR IMMERSION GRATING LITHOGRAPHY
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Assignment:
1
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RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
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| 2 TECH DRIVE |
| SUITE 201 |
| ANDOVER, MASSACHUSETTS 01810 |
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| 2 TECH DRIVE |
| SUITE 201 |
| ANDOVER, MASSACHUSETTS 01810 |
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| 14523 SW MILLIKAN WAY |
| BEAVERTON, OREGON 97005 |
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| JEFFREY NEGRON |
| PAUL HASTINGS LLP |
| 200 PARK AVENUE |
| NEW YORK, NY 10166 |
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Assignment:
2
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RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
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| 2 TECH DRIVE |
| SUITE 201 |
| ANDOVER, MASSACHUSETTS 01810 |
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| 2 TECH DRIVE |
| SUITE 201 |
| ANDOVER, MASSACHUSETTS 01810 |
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| 14523 SW MILLIKAN WAY |
| BEAVERTON, OREGON 97005 |
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| JEFFREY NEGRON |
| PAUL HASTINGS LLP |
| 200 PARK AVENUE |
| NEW YORK, NY 10166 |
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