Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/02/2021
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Application #:
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16809497
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Filing Dt:
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03/04/2020
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Publication #:
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Pub Dt:
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06/25/2020
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Inventors:
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Marcus Adrianus VAN DE KERKHOF, Franciscus Johannes Joseph JANSSEN
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Title:
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HEATING SYSTEM FOR AN OPTICAL COMPONENT OF A LITHOGRAPHIC APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20001 |
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