Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/10/2021
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Application #:
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16777941
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Filing Dt:
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01/31/2020
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Publication #:
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Pub Dt:
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08/06/2020
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Inventors:
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Duan-Fu Stephen Hsu, Jingjing Liu
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Title:
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METHOD AND APPARATUS FOR SOURCE MASK OPTIMIZATION CONFIGURED TO INCREASE SCANNER THROUGHPUT FOR A PATTERNING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP(ASML |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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