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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
12/29/2020
Application #:
16870524
Filing Dt:
05/08/2020
Publication #:
Pub Dt:
08/27/2020
Inventors:
Ramon Van Gorkom, Martin Endres
Title:
ILLUMINATION INTENSITY CORRECTION DEVICE FOR SPECIFYING AN ILLUMINATION INTENSITY OVER AN ILLUMINATION FIELD OF A LITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
060119/0461Recorded: 06/03/2022Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
08/04/2020
Assignee:
DE RUN 6501
VELDHOVEN, NETHERLANDS 5504-DR
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
054209/0852Recorded: 10/29/2020Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
10/21/2020
Assignee:
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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