Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/04/2022
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Application #:
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16473744
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Filing Dt:
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06/26/2019
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Publication #:
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Pub Dt:
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10/01/2020
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Inventors:
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Johannes Weichart, Jurgen Weichart
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Title:
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RF CAPACITIVE COUPLED DUAL FREQUENCY ETCH REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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HAUPTSTRASSE 1A |
TRUBBACH, SWITZERLAND 9477 |
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PEARNE & GORDON LLP |
1801 EAST 9TH STREET |
SUITE 1200 |
CLEVELAND, OH 44114 |
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06/20/2024 08:43 PM
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