Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16955002
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Filing Dt:
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06/17/2020
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Publication #:
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Pub Dt:
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12/03/2020
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Inventors:
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Hiroaki SHISHIDO, Masahiro HASHIMOTO, Takashi UCHIDA, Mariko UCHIDA
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Title:
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MASK BLANK, PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6-10-1 NISHI-SHINJUKU, SHINJUKU-KU |
TOKYO, JAPAN 160-8347 |
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10 TAMPINES INDUSTRIAL CRESCENT |
SINGAPORE, SINGAPORE 528603 |
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KILPATRICK TOWNSEND & STOCKTON LLP |
1100 PEACHTREE STREET |
SUITE 2800 |
ATLANTA, GA 30309 |
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