Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/19/2021
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Application #:
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16902582
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Filing Dt:
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06/16/2020
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Publication #:
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Pub Dt:
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12/24/2020
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Inventors:
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Du Zhang, Yu-Hao Tsai, Mingmei Wang
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Title:
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HIGHLY SELECTIVE SILICON OXIDE/SILICON NITRIDE ETCHING BY SELECTIVE BORON NITRIDE OR ALUMINUM NITRIDE DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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AKASAKA BIZ TOWER |
3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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TOKYO ELECTRON U.S. HOLDINGS, INC. |
2400 GROVE BLVD. |
AUSTIN, TX 78741 |
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05/10/2024 01:50 AM
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