Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/2022
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Application #:
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16593149
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Filing Dt:
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10/04/2019
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Publication #:
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Pub Dt:
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01/28/2021
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Inventors:
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Byunghoon Lee, Byunggook Kim, Muyoung Kim, Sungwoo Park, Joonmyung Choi, Changyoung Jeong et al
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Title:
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LITHOGRAPHY METHOD USING MULTI-SCALE SIMULATION, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND EXPOSURE EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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| 1, GWANAK-RO, GWANAK-GU |
| SEOUL, KOREA, REPUBLIC OF 08826 |
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| MUIR PATENT LAW, PLLC |
| P.O. BOX 1213 |
| GREAT FALLS, VA 22066 |
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