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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
16979715
Filing Dt:
09/10/2020
Publication #:
Pub Dt:
02/11/2021
Inventors:
Chikako TAKATOH, Masamitsu KURASHITA, Akira FUKUNAGA, Megumi UNO, Satomi HAMADA
Title:
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Assignment: 1
Reel/Frame:
053752/0842Recorded: 09/10/2020Pages: 27
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/18/2020
Exec Dt:
08/17/2020
Exec Dt:
08/28/2020
Exec Dt:
08/25/2020
Exec Dt:
09/08/2020
Assignee:
11-1, HANEDA ASAHI-CHO, OTA-KU
TOKYO, JAPAN 144-8510
Correspondent:
LEYDIG, VOIT & MAYER, LTD
TWO PRUDENTIAL PLAZA, SUITE 4900
180 NORTH STETSON AVENUE
CHICAGO, IL 60601-6731

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