Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/04/2022
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Application #:
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16979793
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Filing Dt:
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09/10/2020
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Publication #:
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Pub Dt:
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02/11/2021
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Inventor:
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Atsushi SAWACHI
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Title:
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GAS SUPPLY SYSTEM, PLASMA PROCESSING APPARATUS, AND CONTROL METHOD FOR GAS SUPPLY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ROTHWELL, FIGG, ERNST & MANBECK, P.C. |
| 607 14TH STREET, N.W., SUITE 800 |
| WASHINGTON, DC 20005 |
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