Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/26/2022
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Application #:
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16977137
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Filing Dt:
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09/01/2020
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Publication #:
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Pub Dt:
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02/18/2021
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Inventors:
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Hongfei SHI, Jinze WANG, Pengcheng YANG, Lei WANG, Mu FENG
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Title:
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INSTANT TUNING METHOD FOR ACCELERATING RESIST AND ETCH MODEL CALIBRATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 324 |
VELDHOVEN, NETHERLANDS 5500 AH |
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PILLSBURY WINTHROP SHAW PITTMAN LLP |
P.O. BOX 10500 |
MCLEAN, VA 22102 |
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09/21/2024 11:08 AM
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