Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/05/2023
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Application #:
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17096979
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Filing Dt:
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11/13/2020
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Publication #:
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Pub Dt:
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03/04/2021
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Inventors:
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Martin Lambert, Tolga Ergin
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Title:
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FOCUSING DEVICE AND EUV RADIATION GENERATING DEVICE HAVING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| JOHANN-MAUS-STRASSE 2 |
| DITZINGEN, GERMANY 71254 |
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| LEYDIG, VOIT & MAYER, LTD. |
| TWO PRUDENTIAL PLAZA, SUITE 4900 |
| SUITE 4900 ADDRESS LINE 2: |
| CHICAGO, IL 606016731 |
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