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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/09/2024
Application #:
17050373
Filing Dt:
10/23/2020
Publication #:
Pub Dt:
04/22/2021
Inventors:
Hyo Chang LEE, Jung Hyung KIM, Dae Jin SEONG, Hee Jung YEOM
Title:
PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS, WAFER-TYPE PLASMA DIAGNOSIS APPARATUS IN WHICH PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS IS BURIED, AND ELECTROSTATIC CHUCK IN WHICH PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS IS BURIED
Assignment: 1
Reel/Frame:
054154/0907Recorded: 10/23/2020Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/28/2020
Exec Dt:
09/28/2020
Exec Dt:
09/28/2020
Exec Dt:
09/28/2020
Assignee:
267 GAJEONG-RO, YUSEONG-GU
DAEJEON, KOREA, REPUBLIC OF 34113
Correspondent:
STIP LAW GROUP, LLC
8850 STANFORD BLVD, SUITE 1950
COLUMBIA, MD 21045

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