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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	11798821	Issue Dt:	10/24/2023	Application #:	17072457	Filing Dt:	10/16/2020
Publication #:	20210118707	Pub Dt:	04/22/2021
Inventors:	Shinsuke TAKAKI, Koji USHIMARU, Yukinobu OTSUKA, Yasuhiro KUGA, Ryohei FUJISE
Title:	SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM

Assignment: 1

Reel/Frame:

054130/0562

Recorded: 10/21/2020

Pages: 10

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

OTSUBA, YUKINOBU

Exec Dt:

10/05/2020

TAKAKI, SHINSUKE

Exec Dt:

10/05/2020

KUGA, YASUHIRO

Exec Dt:

10/13/2020

USHIMARU, KOJI

Exec Dt:

10/06/2020

FUJISE, RYOHEI

Exec Dt:

10/05/2020

Assignee:

TOKYO ELECTRON LIMITED

AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME

MINATO-KU

TOKYO, JAPAN 107-6325

Correspondent:

NATH GOLDBERG AND MEYER

112 S WEST STREET

ALEXANDRIA, VA 22314

Assignment: 2

Reel/Frame:

054276/0029

Recorded: 11/02/2020

Pages: 10

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE SPELLING OF THE FIRST INVENTOR'S FIRST NAME PREVIOUSLY RECORDED ON REEL 054130 FRAME 0562. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNOR'S INTEREST..

Assignors:

OTSUKA, YUKINOBU

Exec Dt:

10/05/2020