Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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11/30/2021
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Application #:
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17158083
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Filing Dt:
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01/26/2021
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Publication #:
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Pub Dt:
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05/20/2021
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Inventors:
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Toralf GRUNER, Philip LUCKE, Johannes LIPPERT, Kerstin HILD, Mohammadreza NEMATOLLAHI
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Title:
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MIRROR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND METHOD FOR OPERATING A DEFORMABLE MIRROR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| EDELL, SHAPIRO & FINNAN, LLC |
| GEORGE F. LEHNIGK |
| 9801 WASHINGTONIAN BLVD., SUITE 750 |
| GAITHERSBURG, MD 20878 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DRIENERLOLAAN 5 |
| ENSCHEDE, NETHERLANDS 7522 NB |
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| EDELL, SHAPIRO & FINNAN, LLC |
| 9801 WASHINGTONIAN BLVD., SUITE 750 |
| GEORGE F. LEHNIGK |
| GAITHERSBURG, MD 20878 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| EDELL, SHAPIRO & FINNAN, LLC |
| GEORGE F. LEHNIGK |
| 9801 WASHINGTONIAN BLVD., SUITE 750 |
| GAITHERSBURG, MD 20878 |
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