Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/05/2024
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Application #:
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17192012
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Filing Dt:
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03/04/2021
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Publication #:
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Pub Dt:
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06/24/2021
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Inventors:
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Florian Baumer, Matthias Manger
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Title:
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METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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SEAN P. DALEY |
FISH & RICHARDSON P.C. |
P.O.BOX 1022 |
MINNEAPOLIS, MN 55440-1022 |
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06/25/2024 10:18 AM
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