Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17255286
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Filing Dt:
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12/22/2020
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Publication #:
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Pub Dt:
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08/26/2021
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Inventors:
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Hiroshi YANAGITA, Takayuki SAO, Shunji KAWATO, Yusuke HAMA, Taku HIRAYAMA
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Title:
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A PHOTORESIST COMPOSITION, A METHOD FOR MANUFACTURING A PHOTORESIST COATING, ETCHED PHOTORESIST COATING, AND ETCHED SI CONTAINING LAYER(S), AND MANUFACTURING A DEVICE USING THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FRANKFURTER STRASSE 250 |
| DARMSTADT, GERMANY 64293 |
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| FAEGRE DRINKER BIDDLE & REATH LLP (WM) |
| ATTN: INTELLECTUAL PROPERTY GROUP |
| ONE LOGAN SQUARE, SUITE 2000 |
| PHILADELPHIA, PA 19103-6996 |
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