Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/30/2024
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Application #:
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17347070
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Filing Dt:
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06/14/2021
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Publication #:
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Pub Dt:
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09/30/2021
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Inventors:
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Yihong Chen, Kevin Griffin, Joseph Yudovsky, Kelvin Chan, Jared Ahmad Lee et al
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Title:
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ENHANCED SPATIAL ALD OF METALS THROUGH CONTROLLED PRECURSOR MIXING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3030 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| SERVILLA WHITNEY LLC |
| 33 WOOD AVENUE SOUTH |
| SUITE 830 |
| ISELIN, NJ 08830 |
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