Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/31/2023
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Application #:
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17328253
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Filing Dt:
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05/24/2021
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Publication #:
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Pub Dt:
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10/21/2021
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Inventor:
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John Hautala
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Title:
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TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USING ANGLED BEAMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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KDB PLLC - VARIAN AND APPLIED MATERIALS |
2601 WESTON PARKWAY |
SUITE 103 |
CARY, NC 27513 |
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05/29/2024 08:59 PM
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