Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
11/08/2022
|
Application #:
|
17176342
|
Filing Dt:
|
02/16/2021
|
|
Publication #:
|
|
Pub Dt:
|
11/04/2021
| | | | |
|
Inventors:
|
Junling Sun, Andrew Metz, Angelique Raley
|
|
Title:
|
Systems and Methods to Control Critical Dimension (CD) Shrink Ratio through Radio Frequency (RF) Pulsing
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
|
|
|
|
| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
|
|
Search Results as of:
05/12/2024 05:09 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
