Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/19/2024
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Application #:
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17315619
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Filing Dt:
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05/10/2021
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Publication #:
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Pub Dt:
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12/09/2021
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Inventors:
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Chunying Han, Shouyan Huang, Weimin Ma, Chengcheng Liu
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Title:
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Overlay Alignment Mark and Method for Measuring Overlay Error
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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BUILDING 12, #156, 4TH JINGHAI ROAD, BEIJING ECONOMIC |
TECHNOLOGICAL DEVELOPMENT DISTRICT |
BEIJING, CHINA 100176 |
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TONY ZHANG |
FISH & RICHARDSON P.C. |
P.O.BOX 1022 |
MINNEAPOLIS, MN 55440-1022 |
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09/22/2024 08:26 PM
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