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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/23/2024
Application #:
17386850
Filing Dt:
07/28/2021
Publication #:
Pub Dt:
02/03/2022
Inventors:
Koudai Higashi, Masato Hayashi, Kohei Noguchi
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
057001/0864Recorded: 07/28/2021Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/22/2021
Exec Dt:
07/15/2021
Exec Dt:
07/28/2021
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
PEARNE & GORDON LLP
1801 EAST 9TH STREET, SUITE 1200
CLEVELAND, OH 44114

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