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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/21/2022
Application #:
17337560
Filing Dt:
06/03/2021
Publication #:
Pub Dt:
02/03/2022
Inventors:
Hirokazu HOSODA, Takanari KOBAYASHI, Yoshiyuki HONDA
Title:
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
056425/0851Recorded: 06/03/2021Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/05/2021
Exec Dt:
01/07/2021
Exec Dt:
01/05/2021
Assignee:
400, OAZA YOKOKURASHINDEN, OYAMA-SHI
TOCHIGI, JAPAN 3238558
Correspondent:
STUDEBAKER & BRACKETT PC
8255 GREENSBORO DRIVE
SUITE 300
TYSONS, VA 22102

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