Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/25/2024
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Application #:
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17299531
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Filing Dt:
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06/03/2021
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Publication #:
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Pub Dt:
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02/03/2022
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Inventors:
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Maurits VAN DER SCHAAR, Olger Victor ZWIER, Patrick WARNAAR
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Title:
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TARGET FOR MEASURING A PARAMETER OF A LITHOGRAPHIC PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| MR. DONALD J. FEATHERSTONE |
| 1101 K. STREET, NW. |
| 10TH FLOOR |
| WASHINGTON, DC 20005 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| DONALD J. FEATHERSTONE |
| 1101 K. STREET, NW. |
| 10TH FLOOR |
| WASHINGTON, DC 20005 |
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06/25/2024 02:13 PM
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