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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/10/2023
Application #:
17367100
Filing Dt:
07/02/2021
Publication #:
Pub Dt:
02/24/2022
Inventors:
Sang Jun PARK, Jun Hyuck KWON, Tian Hao HAN, Kwang Seon JIN, Byung Chul CHO, Jong Ki AN
Title:
METHOD AND APPARATUS FOR ATOMIC LAYER ETCHING
Assignment: 1
Reel/Frame:
056747/0889Recorded: 07/02/2021Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/24/2021
Exec Dt:
06/24/2021
Exec Dt:
06/24/2021
Exec Dt:
06/24/2021
Exec Dt:
06/24/2021
Exec Dt:
06/24/2021
Assignee:
75, JINWISANDAN-RO, JINWI-MYEON
PYEONGTAEK-SI GYEONGGI-DO, KOREA, REPUBLIC OF 17709
Correspondent:
WILLIAM PARK & ASSOCIATES LTD.
930 N. YORK ROAD, SUITE 201
HINSDALE, IL 60521

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