Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/22/2024
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Application #:
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17445775
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Filing Dt:
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08/24/2021
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Publication #:
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Pub Dt:
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03/03/2022
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Inventors:
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Xiaosong YANG, Hai ZHANG, Yimin WU
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Title:
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COMPENSATION METHOD FOR OVERLAY DEVIATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5TH FLOOR, BUILDING 3,18 ZHANGJIANG ROAD, PUDONG NEW AREA |
| SHANGHAI, CHINA 201203 |
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| ANOVA LAW GROUP C/O SMIC |
| 21495 RIDGETOP CIRCLE |
| SUITE 300 |
| STERLING, VA 20166 |
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