Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/08/2023
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Application #:
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17428821
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Filing Dt:
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08/05/2021
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Publication #:
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Pub Dt:
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04/28/2022
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Inventors:
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Osamu NOZAWA, Hitoshi MAEDA, Hiroaki SHISHIDO
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Title:
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MASK BLANK, PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-10-1 NISHI-SHINJUKU, SHINJUKU-KU |
| TOKYO, JAPAN 160-8347 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| 1100 PEACHTREE STREET |
| ATLANTA, GA 30309 |
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