Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/17/2023
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Application #:
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17539942
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Filing Dt:
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12/01/2021
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Publication #:
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Pub Dt:
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06/02/2022
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Inventors:
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Hyeong Keun KIM, Jin Woo CHO, Hyun Mi KIM, Seul Gi KIM, Jun Hyeok JEON
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Title:
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METHOD FOR MANUFACTURING PELLICLE FOR EXTREME ULTRAVIOLET LITHOGRAPHY HAVING GRAPHENE DEFECT HEALING LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 25, SAENARI-RO, BUNDANG-GU |
| SEONGNAM-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 13509 |
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| KNOBBE, MARTENS, OLSON & BEAR, LLP |
| 2040 MAIN STREET |
| 14TH FLOOR |
| IRVINE, CA 92614 |
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