Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17536048
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Filing Dt:
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11/28/2021
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Publication #:
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Pub Dt:
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06/09/2022
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Inventors:
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Seo Young MAENG, Il Jun JEON, Su Ji GIM, Jin Hong KIM, Young Seok ROH, Jong Yong BAE et al
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Title:
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SCRUBBER, ALD PROCESS SYSTEM INCLUDING THE SCRUBBER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SCRUBBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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| 268, GEUMEO-RO, POGOK-EUP, CHEOIN-GU |
| YONGIN-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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| MUIR PATENT LAW, PLLC |
| P.O. BOX 1213 |
| GREAT FALLS, VA 22066 |
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