Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/27/2024
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Application #:
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17580936
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Filing Dt:
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01/21/2022
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Publication #:
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Pub Dt:
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08/11/2022
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Inventors:
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Jacques Faguet, Tetsuya Sakazaki, Paul Abel
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Title:
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Dynamically Adjusted Purge Timing In Wet Atomic Layer Etching
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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AKASAKA BIZ TOWER |
3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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TEL-EGAN, ENDERS & HUSTON LLP. |
1101 S. CAPITAL OF TEXAS HIGHWAY |
BLDG. C, SUITE 200 |
AUSTIN, TX 78746 |
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