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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17690709
Filing Dt:
03/09/2022
Publication #:
Pub Dt:
09/22/2022
Inventors:
Atsushi YAMASHITA, Koji KAGAWA
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
059223/0978Recorded: 03/10/2022Pages: 10
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/02/2022
Exec Dt:
02/24/2022
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
NATH, GOLDBERG & MEYER
112 S. WEST ST.
38983U_JLM/ALS
ALEXANDRIA, VA 22314

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