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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/08/2024
Application #:
17221215
Filing Dt:
04/02/2021
Publication #:
Pub Dt:
10/06/2022
Inventors:
Qiwei LIANG, Douglas Arthur BUCHBERGER Jr., Gautam PISHARODY, Dmitry LUBOMIRSKY et al
Title:
ROTATING BIASABLE PEDESTAL AND ELECTROSTATIC CHUCK IN SEMICONDUCTOR PROCESS CHAMBER
Assignment: 1
Reel/Frame:
055969/0193Recorded: 04/20/2021Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/04/2021
Exec Dt:
04/09/2021
Exec Dt:
04/02/2021
Exec Dt:
04/04/2021
Exec Dt:
04/04/2021
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
MOSER TABOADA/ALAN TABOADA
1030 BROAD STREET
SUITE 203
SHREWSBURY, NJ 07702

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