Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17389263
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Filing Dt:
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07/29/2021
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Publication #:
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Pub Dt:
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10/13/2022
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Inventors:
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Hai-Dang Trinh, Hsun-Chung Kuang, Fa-Shen Jiang
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Title:
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REMOTE PLASMA ULTRAVIOLET ENHANCED DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300-78 |
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KILPATRICK TOWNSEND & STOCKTON LLP |
1100 PEACHTREE STREET |
SUITE 2800 |
ATLANTA, GA 30309 |
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05/29/2024 10:28 AM
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