Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17682745
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Filing Dt:
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02/28/2022
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Publication #:
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Pub Dt:
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12/22/2022
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Inventors:
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Tomohiko SUGITA, Hiroshi FUJITA, Tatsuhiko KOIDE
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Title:
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SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-21, SHIBAURA 3-CHOME, MINATO-KU |
| TOKYO, JAPAN 108-0023 |
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| KIM & STEWART LLP |
| 111 N. MARKET ST. |
| SUITE 414 |
| SAN JOSE, CA 95113 |
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