Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17679483
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Filing Dt:
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02/24/2022
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Publication #:
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Pub Dt:
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01/19/2023
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Inventors:
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Yu-Ting Tsai, Hung-Chih Wang, Hong-Ming Lo, Shao-Shuo Wu, Su-Yu Yeh
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Title:
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SYSTEM AND METHOD FOR CLEANING A PRE-CLEAN PROCESS CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
HSINCHU, CHINA 300-78 |
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FAY SHARPE LLP |
1228 EUCLID AVENUE, 5TH FLOOR |
THE HALLE BUILDING |
CLEVELAND, 44115 UNITED STATES |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300-78 |
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FAY SHARPE LLP |
1228 EUCLID AVE |
CLEVELAND, OH 44115 |
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09/21/2024 04:55 PM
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