Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17679749
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Filing Dt:
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02/24/2022
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Publication #:
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Pub Dt:
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02/09/2023
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Inventors:
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Johan Hofkens, Flip de Jong, Sukjong Bae, Haifeng Yuan
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Title:
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PHOTORESIST INSPECTION APPARATUS, PHOTORESIST INSPECTION METHOD USING THE SAME, AND ELECTRON BEAM EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KU LEUVEN R&D |
| WAAISTRAAT 6-BOX 5105 |
| LEUVEN, BELGIUM 3000 |
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| CAREY GREGORY/MYERS BIGEL |
| PO BOX 37428 |
| RALEIGH, NC 27627 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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| CAREY GREGORY/MYERS BIGEL |
| PO BOX 37428 |
| RALEIGH, NC 27627 |
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