Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/27/2023
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Application #:
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17564241
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Filing Dt:
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12/29/2021
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Publication #:
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Pub Dt:
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02/16/2023
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Inventors:
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Haiqing Wei, Shiyuan Liu, Hao Jiang
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Title:
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METHOD AND SYSTEM FOR CORRECTING LITHOGRAPHY PROCESS HOTSPOTS BASED ON STRESS DAMPING ADJUSTMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.1037 LUOYU ROAD, HONGSHAN WUHAN, |
| HUBEI, CHINA 430074 |
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| JCIPRNET |
| 8F-1, NO. 100, ROOSEVELT RD. SEC. 2, |
| TAIPEI, 100404 TAIWAN |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HAIDA INNOVATION SQUARE 2002, DONGXIN ROAD, EAST LAKE NEW TECHNOLOGY DEVELOPMENT ZONE, WUHAN, |
| HUBEI, CHINA |
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| JCIPRNET |
| 8F-1, NO. 100, ROOSEVELT RD. SEC. 2, |
| TAIPEI, 100404 TAIWAN |
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